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FFA - Surface science, surface physics - general aspects
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FFA - Surface science, surface physics - general aspects
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Low energy ion-surface interactions /
Rabalais, J. Wayne.
1994
Subject (ZB):
“
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film
deposition
...
”
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Rabalais, J. Wayne.
1
Subject
determination
1
electron emission
1
film deposition
1
growth
1
insulator
1
interaction
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ion
1
ion beam
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ion scattering
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metal
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model
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molecular ion
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morphology
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scattering
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semiconductor surface
1
sputtering
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structure
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surface
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surface interaction
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synthesis
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thin film
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FFA - Surface science, surface physics - general aspects
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