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FFP - Physics of thin films
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FGKJ - Plasma processing, etching
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FFP - Physics of thin films
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FGKJ - Plasma processing, etching
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Plasma sources for thin film deposition and etching.
Francombe, M. H.
1994
Subject (ZB):
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...thin
film
physics...
”
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Francombe, M. H.
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plasma deposition
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plasma etching
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thin film physics
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thin film technology
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FFP - Physics of thin films
FGKJ - Plasma processing, etching
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