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FFP - Physics of thin films
plasma etching
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FFP - Physics of thin films
plasma etching
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Plasma sources for thin film deposition and etching.
Francombe, M. H.
1994
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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Francombe, M. H.
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plasma deposition
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plasma etching
thin film physics
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thin film technology
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FFP - Physics of thin films
FGKJ - Plasma processing, etching
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