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1

Ion implantation /

Book

Ion implantation /

Dearnaley, G.
1973

Subject (ZB): “...channeling...”

2

Ion implantation in semiconductors : proceedings of the US Japan seminar : Kyoto, 09.08.71-12.08.71.

Book

Ion implantation in semiconductors : proceedings of the US Japan seminar : Kyoto, 09.08.71-12.08.71.

Namba, S.
1972

Subject (ZB): “...channeling...”

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