1
In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Book
Subject (ZB): ...electron beam processing...
2
High energy density technologies in materials science. 2 : IGD Scientific Workshop : proceedings : Novara, 03.05.88-04.05.88.
Book
Subject (ZB): ...electron beam processing...
3
Plasma, electron, and laser beam technology : development and use in materials processing /
Book
Subject (ZB): ...electron beam processing...