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FGJ - Laser and electron beam processing
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FGJ - Laser and electron beam processing
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1
Book
International Symposium on Laser Precision Microfabrication. 1 : 14-16 June 2000, Omiya, Saitana, Japan /
Miyamoto, Isamu
2000
Subject (ZB):
“
...microfabrication (for
microelectronics
only)...
”
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2
Book
International conference on electron and ion beam science and technology. 6 : San-Francisco, CA, 12.05.74-17.05.74.
Bakish, R.
1974
Subject (ZB):
“
...
microelectronics
...
”
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Available as
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2
Material Type
Book
2
Type of Literature
Conference Publication
2
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ZB
2
Name
Bakish, R.
1
Miyamoto, Isamu
1
Subject
electron beam welding
1
laser processing
1
microelectronics
1
microfabrication (for microelectronics only)
1
surface modification
1
Classification
FGJ - Laser and electron beam processing
FGGE - Ion beam surface modification
1
FGME - Microlithography
1
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