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FGK - Thin film technology, epitaxy
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FGM - Microelectronic technology
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FGK - Thin film technology, epitaxy
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FGM - Microelectronic technology
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1
Book
Low and high dielectric constant materials. Thin film materials for advanced packaging technologies :
materials
science
, processing and reliability issues : proceedings of the Fourth International Symposium [on Low and High Dielectric Constant Materials...
Singh, R.
1999
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2
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Materials
science
in microelectronics. 2. The effects of structure on properties in thin films /
Machlin, Eugene S.
1998
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Materials
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in microelectronics ;...
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3
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Low and high dielectric constant materials :
materials
science
, processing and reliability issues : proceedings of the Second International Symposium [on Low and High Dielectric Constant Materials] /
Rathore, Hazara S.
1997
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4
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Processing of semiconductors.
Jackson, K. A.
1996
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5
Book
Materials
science
in microelectronics. 1. The relationships between thin film processing and structure /
Machlin, Eugene S.
1995
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in microelectronics ;...
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Available as
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5
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2
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ZB
5
IBN-1-2
1
IMD-3
1
Name
Machlin, Eugene S.
2
Jackson, K. A.
1
Rathore, Hazara S.
1
Singh, R.
1
Subject
microelectronics
4
thin film technology
4
dielectric constant
2
dielectric material
2
defect
1
electrical properties
1
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film deposition
1
magnetic properties
1
mechanical properties
1
optical properties
1
semiconductor processing
1
structure
1
transport properties
1
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Classification
FGK - Thin film technology, epitaxy
FGM - Microelectronic technology
FJBC - Dielectric materials
2
FAF - Materials research - comprehensive works
1
FFP - Physics of thin films
1
FGA - Materials processing - general aspects
1
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TBF - Semiconductor devices
1
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