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FGK - Thin film technology, epitaxy
AND
TBL - VLSI
IBN-1-2
Print Edition
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FGK - Thin film technology, epitaxy
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TBL - VLSI
IBN-1-2
Print Edition
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1
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ULSI technology /
Chang, C. Y.
1996
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Interconnects in VLSI design /
Grabinski, Hartmut
2000
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3
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Silicon VLSI technology : fundamentals, practice and modeling /
Plummer, James D.
2000
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IBN-1-2
IFF
1
Name
Chang, C. Y.
1
Deal, Michael D.
1
Grabinski, Hartmut
1
Griffin, Peter B.
1
Plummer, James D.
1
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VLSI technology
2
ULSI (ultra large scale integration)
1
chemical vapor deposition
1
connector
1
epitaxy
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etching
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fabrication
1
lithography
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metallization
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FGK - Thin film technology, epitaxy
FGM - Microelectronic technology
3
TBL - VLSI
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