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FGK - Thin film technology, epitaxy
IBN-1-2
AND
ZB
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FGK - Thin film technology, epitaxy
IBN-1-2
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ZB
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1
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Dünnschichttechnologie /
Frey, Hartmut.
1987
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2
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Handbook of thin film technology.
Maissel, L. I.
1970
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3
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Substrate engineering : paving the way to epitaxy : symposium held November 29 - December, 3, 1999, Boston, Massachusetts, USA [MRS fall meeting 1999] /
Norton, David
2000
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4
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Processing of semiconductors.
Jackson, K. A.
1996
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4
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IBN-1-2
ZB
IBN-3-4
1
IKP
1
PTJ
1
Name
Frey, Hartmut.
1
Jackson, K. A.
1
Kienel, Gerhard.
1
Maissel, L. I.
1
Norton, David
1
Subject
epitaxy
2
multilayer system
1
semiconductor processing
1
semiconductor surface
1
thin film
1
thin film technology
1
Classification
FGK - Thin film technology, epitaxy
FAF - Materials research - comprehensive works
1
FFP - Physics of thin films
1
FGA - Materials processing - general aspects
1
FGM - Microelectronic technology
1
TBF - Semiconductor devices
1
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