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FGK - Thin film technology, epitaxy
IBN-1-2
Conference Publication
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FGK - Thin film technology, epitaxy
IBN-1-2
Conference Publication
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1
Book
Epitaxial crystal growth : International Conference on Epitaxial Crystal Growth : 0001: proceedings. vol 0001: invited papers : EPI : 0001: proceedings. vol 0001: invitedpapers : B...
Lendvay, E.
1991
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2
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Epitaxial crystal growth : International Conference on Epitaxial Crystal Growth : 0001: proceedings. vol 0002: contributed papers : EPI : 0001: proceedings. vol 0002: contributed p...
Lendvay, E.
1991
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Low dimensional structures prepared by epitaxial growth or regrowth on patterned substrates : NATO advanced research workshop on low dimensional structures prepared by epitaxial gr...
Eberl, K.
1995
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Ultrathin SiO2 and high-K materials for ULSI gate dielectrics : symposium held April 5 - 8, 1999, San Francisco, California, USA [at the 1999 MRS spring meeting] /
Huff, H. R.
1999
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5
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Substrate engineering : paving the way to epitaxy : symposium held November 29 - December, 3, 1999, Boston, Massachusetts, USA [MRS fall meeting 1999] /
Norton, David
2000
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5
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Conference Publication
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IBN-1-2
IFF
1
ZB
1
Name
Lendvay, E.
2
Eberl, K.
1
Huff, H. R.
1
Norton, David
1
Subject
epitaxy
4
crystal growth
2
ULSI (ultra large scale integration)
1
dielectric film
1
multilayer system
1
nanostructures
1
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semiconductor surface
1
thin film
1
thin film technology
1
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Classification
FGK - Thin film technology, epitaxy
FFPG - Multilayer systems, quantum structures
1
FGM - Microelectronic technology
1
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