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Herstellung von Hochtemperatur-Brennstoffzellen über physikalische Gasphasenabscheidung /
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Subject (ZB): “...sputter deposition...”
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Herstellung von Hochtemperatur-Brennstoffzellen über physikalische Gasphasenabscheidung [E-Book] /
Subject (ZB): “...sputter deposition...”

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Reactive sputter deposition /
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Subject (ZB): “...sputter deposition...”
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Handbook of sputter deposition technology : principles, technology, and applications /
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Subject (ZB): “...sputter deposition...”
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Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
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Weinig, S.
1984
Subject (ZB): “...sputter deposition...”
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