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FGKF - Chemical vapor deposition
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FGMH - Metallization, physics of microelectronics
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FGKF - Chemical vapor deposition
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FGMH - Metallization, physics of microelectronics
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Chemical perspectives of microelectronics materials. 0002 : Biennial Meeting of Chemical Perspectives of Microelectronic Materials : 0002: proceedings : Materials Research Society...
Interrante, L. V.
1991
Subject (ZB):
“
...metallic
film
...
”
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compound semiconductor
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gallium arsenide
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metallic film
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microelectronics
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semiconductor epitaxy
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FAF - Materials research - comprehensive works
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FGKF - Chemical vapor deposition
FGMH - Metallization, physics of microelectronics
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