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FGKJ - Plasma processing, etching
AND
PGA - Plasma physics
ZB
cold plasma
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FGKJ - Plasma processing, etching
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PGA - Plasma physics
ZB
cold plasma
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /
Ostrikov, Kostya (Ken)
2008
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Kawai, Yoshinobu
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Ostrikov, Kostya (Ken)
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FGKJ - Plasma processing, etching
PGA - Plasma physics
CLD - High temperature chemistry, plasma chemistry
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