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FGKJ - Plasma processing, etching
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PGA - Plasma physics
thin film technology
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FGKJ - Plasma processing, etching
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PGA - Plasma physics
thin film technology
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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Kawai, Yoshinobu
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Lichtenberg, Allan J.
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Lieberman, Michael E.
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thin film technology
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chemical vapor deposition
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cold plasma
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discharge
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flow distribution
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plasma etching
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FGKJ - Plasma processing, etching
PGA - Plasma physics
CLD - High temperature chemistry, plasma chemistry
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