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FGKJ - Plasma processing, etching
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PGA - Plasma physics
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FGKJ - Plasma processing, etching
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PGA - Plasma physics
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1
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
Subject (ZB):
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...thin
film
technology...
”
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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...thin
film
technology...
”
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IEK-4
1
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Kawai, Yoshinobu
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Subject
thin film technology
2
biological aspect
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chemical vapor deposition
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cold plasma
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discharge
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environmental impact
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flow distribution
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gas flow
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ion implantation
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plasma
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plasma etching
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plasma physics
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FGKJ - Plasma processing, etching
PGA - Plasma physics
CLD - High temperature chemistry, plasma chemistry
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