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FGKJ - Plasma processing, etching
gas flow
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FGKJ - Plasma processing, etching
gas flow
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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...thin
film
technology...
”
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Kawai, Yoshinobu
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cold plasma
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CLD - High temperature chemistry, plasma chemistry
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FGKJ - Plasma processing, etching
PGA - Plasma physics
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