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FGKJ - Plasma processing, etching
plasma etching
AND
thin film technology
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FGKJ - Plasma processing, etching
plasma etching
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thin film technology
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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...thin
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Plasma sources for thin film deposition and etching.
Francombe, M. H.
1994
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...thin
film
physics...
”
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IEK-4
1
Name
Francombe, M. H.
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Subject
plasma etching
thin film technology
chemical vapor deposition
1
discharge
1
ion implantation
1
plasma deposition
1
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plasma physics
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thin film physics
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FGKJ - Plasma processing, etching
FFP - Physics of thin films
1
PGA - Plasma physics
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