1
Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
Book
Subject (ZB): “...sputter deposition...”
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2
Wear and corrosion resistant coatings by CVD and PVD /
Book
Subject (ZB): “...sputter deposition...”
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3
Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
Book
Weinig, S.
1984
Subject (ZB): “...sputter deposition...”
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