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FGM - Microelectronic technology
IBN-1-2
Print Edition
lithography
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FGM - Microelectronic technology
IBN-1-2
Print Edition
lithography
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1
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Microsystem technology /
Menz, Wolfgang.
2001
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2
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ULSI technology /
Chang, C. Y.
1996
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IBN-1-2
IFF
1
ZB
1
Name
Chang, C. Y.
1
Menz, Wolfgang.
1
Mohr, Jürgen.
1
Paul, Oliver.
1
Subject
lithography
ULSI (ultra large scale integration)
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chemical vapor deposition
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epitaxy
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etching
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fabrication
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metallization
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microelectronics
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microstructure
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microtechnology
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FGM - Microelectronic technology
FGK - Thin film technology, epitaxy
1
FGT - Microtechnology
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TBL - VLSI
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