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FGM - Microelectronic technology
IBN-1-2
Print Edition
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FGM - Microelectronic technology
IBN-1-2
Print Edition
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Select result number 21
21
Book
Materials science of microelectromechanical systems (MEMS) devices. IV : symposium held November 25-28, 2001 Boston, Massachusetts USA /
Ayon, Arturo A.
2002
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Available as
Print Edition
Material Type
Book
21
Type of Literature
Handbook, Textbook
9
Conference Publication
3
Theses
1
Year of Publication
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To:
Location
IBN-1-2
ZB
9
IFF
3
Name
Sze, S. M.
3
Adam, Douglas J.
1
Ayon, Arturo A.
1
Broussard, Phillip R.
1
Buchheit, Thomas E.
1
Chang, C. Y.
1
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Deal, Michael D.
1
Einspruch, N. G.
1
Francombe, Maurice H.
1
Grabinski, Hartmut
1
Griffin, Peter B.
1
Harris, David.
1
Huff, H. R.
1
Jackson, K. A.
1
Kahn, Harold
1
Mader, H.
1
Menz, Wolfgang.
1
Mohr, Jürgen.
1
Paul, Oliver.
1
Perera, A. G. U.
1
Plummer, James D.
1
Quay, Rüdiger.
1
Ruge, I.
1
Spearing, S. Mark
1
Tauber, Richard N.
1
Taylor, Deborah J.
1
Weste, Neil H. E.
1
Wolf, Stanley.
1
Wood, Colin E. C.
1
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Subject
VLSI technology
5
microelectronics
3
solid state device
3
thin film technology
3
ULSI (ultra large scale integration)
2
epitaxy
2
more ...
field effect transistor
2
integrated circuit
2
lithography
2
microstructure
2
semiconductor device
2
transistor
2
MOS transistor
1
SQUID (superconducting quantum interference device)
1
chemical vapor deposition
1
computer simulation
1
connector
1
dielectric film
1
diode
1
etching
1
fabrication
1
ferroelectric material
1
heterojunction
1
heterostructure
1
infrared detector
1
light emitting device ( LED )
1
magnetic film
1
magnetooptics
1
materials science
1
mechanical properties
1
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Classification
FGM - Microelectronic technology
FGK - Thin film technology, epitaxy
8
FJLB - Physics of semiconductor devices
4
TBL - VLSI
4
FJL - Physics of solid state devices
3
TBF - Semiconductor devices
2
more ...
FAF - Materials research - comprehensive works
1
FAN - Solid state physics - mathematical methods, computer applications
1
FGA - Materials processing - general aspects
1
FGCD - Crystal growth of specific substances
1
FGKJ - Plasma processing, etching
1
FGT - Microtechnology
1
FJBE - Ferroelectric materials
1
FKGM - Magnetic films
1
FLGD - Superconducting devices, circuits
1
TBV - Electronic devices
1
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Language
English
3
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