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FGM - Microelectronic technology
German
epitaxy
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FGM - Microelectronic technology
German
epitaxy
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E-Book
Untersuchung der Facettenbildung bei selektiver Epitaxie von Si mittels LPCVD [E-Book] /
Grimm, Karsten
1997
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ZB
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Name
Grimm, Karsten
1
Subject
chemical vapor deposition
1
epitaxy
semiconductor
1
transmission electron microscopy
1
Classification
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
Language
German
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