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FGME - Microlithography
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FGME - Microlithography
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1
Book
Metallic structures with reduced dimensions /
Romijn, Johannes.
1991
Subject (ZB):
“
...superconducting
film
...
”
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2
Book
Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: sy...
Grubb, D. T.
1991
Subject (ZB):
“
...thin
film
...
”
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2
Name
Grubb, D. T.
1
Romijn, Johannes.
1
Subject
electron transport
1
electronic packaging
1
low dimensional system
1
microelectronics
1
microlithography
1
polymer
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superconducting film
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thin film
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Classification
FGME - Microlithography
FAF - Materials research - comprehensive works
1
FLE - Superconductor materials
1
FNK - Plastics - application, engineering aspects
1
FNL - Polymers, plastics - specific materials
1
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