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FGMH - Metallization, physics of microelectronics
IFF
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FGMH - Metallization, physics of microelectronics
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Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, USA : [Symposium on Advanced Metallization for Future ULSI] /
Tu, K. N.
1997
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Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and...
Blewer, R. S.
1986
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...VLSI
technology
...
”
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Blewer, R. S.
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Tu, K. N.
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metallization
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ULSI (ultra large scale integration)
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FGMH - Metallization, physics of microelectronics
FMT - Refractory metals, refractory alloys
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