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FGMH - Metallization, physics of microelectronics
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FGMH - Metallization, physics of microelectronics
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The physics of submicron semiconductor devices : NATO advanced study institute on physics of submicron semiconductor devices : San-Miniato, 10.07.83-23.07.83 /
Grubin, H. L.
1988
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FGMH - Metallization, physics of microelectronics
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