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FGN - Nanotechnology
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FGN - Nanotechnology
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Manufacturing techniques for microfabrication and nanotechnology /
Madou, Marc J.
2012
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Nanotechnologie /
Köhler, Michael.
2001
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2
Material Type
Book
Type of Literature
Handbook, Textbook
1
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ZB
2
Name
Köhler, Michael.
1
Madou, Marc J.
1
Subject
etching
2
lithography
2
nanotechnology
2
chemical vapor deposition
1
microfabrication (for microelectronics only)
1
microtechnology
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nanostructured material
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Classification
FGN - Nanotechnology
FGT - Microtechnology
1
Language
English
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