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FGT - Microtechnology
microtechnology
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nanostructured material
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FGT - Microtechnology
microtechnology
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nanostructured material
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1
Book
Silicon carbide 1 : Growth, defects, and novel applications /
Friedrichs, Peter
2010
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Micromaterials and nanomaterials 9 : Research on microreliability and nanoreliability, the micro materials center on display ; on the occasion of Bernd Michel's 60th birthday /
Winkler, T.
2009
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Materials issues and modeling for device nanofabrication : symposia held November 29 - December 2, 1999, Boston, Massachusetts, USA /
Merhari, Lhadi
2000
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3
Name
Friedrichs, Peter
1
Merhari, Lhadi
1
Winkler, T.
1
Subject
microtechnology
nanostructured material
crystal growth
1
defect analysis
1
epitaxy
1
integrated circuit
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materials characterization
1
microlithography
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modeling
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molecular electronics
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silicon carbide
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silicon device
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surface physics
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FGT - Microtechnology
FGC - Crystal growth, crystal technology
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FJK - Specific semiconductor materials
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