1
Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th international autumn meeting Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, Septemer 21-26, 2003 /
Book
2
Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6 - 9, 1999, San Francisco, California, USA [as part of the 1999 MRS spring meeting] /
Book