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FJHE - Defects and radiation effects in semiconductors
IBN-1-2
Conference Publication
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FJHE - Defects and radiation effects in semiconductors
IBN-1-2
Conference Publication
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Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th international autumn meeting Seehotel Zeuthen (suburb of Berlin) State of Brand...
Richter, H.
2004
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Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6 - 9, 1999, San Francisco, California, USA [as part of the 1999 MRS spring me...
Gossmann, Hans-Joachim L.
1999
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2
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2
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Conference Publication
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IBN-1-2
Name
Gossmann, Hans-Joachim L.
1
Richter, H.
1
Subject
engineering
1
gettering
1
semiconductor
1
semiconductor heterostructure
1
semiconductor interface
1
semiconductor processing
1
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silicon
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technology
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Classification
FJHE - Defects and radiation effects in semiconductors
FGMH - Metallization, physics of microelectronics
1
FJLB - Physics of semiconductor devices
1
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