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IBN-1-2
Conference Publication
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1
Book
Substrate engineering : paving the way to epitaxy : symposium held November 29 - December, 3, 1999, Boston, Massachusetts, USA [MRS fall meeting 1999] /
Norton, David
2000
Subject (ZB):
“
...thin
film
...
”
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2
Book
Ultrathin SiO2 and high-K materials for ULSI gate dielectrics : symposium held April 5 - 8, 1999, San Francisco, California, USA [at the 1999 MRS spring meeting] /
Huff, H. R.
1999
Subject (ZB):
“
...thin
film
technology...
”
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Conference Publication
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IBN-1-2
IFF
1
ZB
1
Name
Huff, H. R.
1
Norton, David
1
Subject
ULSI (ultra large scale integration)
1
dielectric film
1
epitaxy
1
multilayer system
1
semiconductor surface
1
thin film
1
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thin film technology
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FGK - Thin film technology, epitaxy
2
FGM - Microelectronic technology
1
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