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IEK-4
Behrisch, Rainer.
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Behrisch, Rainer.
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1
Book
Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies /
Behrisch, Rainer.
2007
Subject (ZB):
“
...thin
film
technology...
”
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IEK-4
ZB
1
Name
Behrisch, Rainer.
Subject
film deposition
1
sputtering
1
thin film technology
1
Classification
FANE - Computational solid state physics
1
FGK - Thin film technology, epitaxy
1
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