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IEK-4
Coburn, J. W.
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Coburn, J. W.
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Plasma processing: symposium : Palo-Alto, CA, 15.04.1986-18.04.1986.
Coburn, J. W.
1986
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IEK-4
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Coburn, J. W.
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plasma processing
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FAF - Materials research - comprehensive works
1
FGKJ - Plasma processing, etching
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