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IEK-4
plasma physics
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IEK-4
plasma physics
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1
Book
Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
Subject (ZB):
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...thin
film
technology...
”
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Select result number 2
2
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Plasma science and technology /
Boenig, Herman V.
1982
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IEK-4
ZB
1
Name
Boenig, Herman V.
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Subject
plasma physics
chemical vapor deposition
1
discharge
1
ion implantation
1
plasma etching
1
thin film technology
1
Classification
FGKJ - Plasma processing, etching
1
PGA - Plasma physics
1
PGN - Fusion technology, plasma devices
1
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