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chemical vapor deposition
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chemical vapor deposition
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1
Book
Deposition of diamond-like superhard materials /
Kulisch, Wilhelm.
1999
“
...FGK - Thin film
technology
, epitaxy...
”
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Select result number 2
2
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ULSI
technology
/
Chang, C. Y.
1996
“
...FGM - Microelectronic
technology
...
”
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IFF
IBN-1-2
1
ZB
1
Name
Chang, C. Y.
1
Kulisch, Wilhelm.
1
Subject
chemical vapor deposition
ULSI (ultra large scale integration)
1
diamond film
1
epitaxy
1
etching
1
fabrication
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hardness
1
lithography
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metallization
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nucleation
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Classification
FGK - Thin film technology, epitaxy
2
FGM - Microelectronic technology
1
FNPD - Hard materials, refractory compounds
1
FNX - Carbon, carbon materials
1
TBL - VLSI
1
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