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metallic film
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Recent developments in oxide and metal epitaxy : theory and experiment : symposium held April 23-26, 2000, San Francisco, California, [at the 2000 MRS spring meeting] /
Yeadon, Mark
2000
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Advanced interconnects and contacts : symposium held April 5 - 7, 1999, San Francisco, California, USA [MRS spring meeting 1999] /
Edelstein, Daniel C.
1999
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IFF
Name
Edelstein, Daniel C.
1
Yeadon, Mark
1
Subject
metallic film
corrosion
1
epitaxy
1
microelectronics
1
semiconductor
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silicide
1
Classification
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
1
FJLB - Physics of semiconductor devices
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