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1
Book
Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
2000
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silicon
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Halbleiterätzverfahren: Kinetik, Verfahrensgrundlagen und Anwendungsgebiete von nasschemischen Ätzverfahren für Silizium, Galliumarsenid, Galliumphosphid und Indiumphosphid.
Loewe, H.
1990
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silicon
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1
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Name
Keppel, P.
1
Loewe, H.
1
Moritz, C.
1
Tauber, Richard N.
1
Wolf, Stanley.
1
Zach, D.
1
Subject
silicon
2
III - V semiconductor
1
VLSI technology
1
etching
1
integrated circuit
1
semiconductor processing
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FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
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FJKB - Elemental semiconductors
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FJKC - III - V semiconductors
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