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ZB
Conference Publication
Lucovsky, G.
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ZB
Conference Publication
Lucovsky, G.
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1
Book
Characterization of plasma enhanced cvd processes: symposium: proceedings : Boston, MA, 27.11.89-28.11.89.
Lucovsky, G.
1990
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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ZB
Name
Lucovsky, G.
Subject
chemical vapor deposition
1
plasma deposition
1
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FAF - Materials research - comprehensive works
1
FGKJ - Plasma processing, etching
1
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