1
In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Book
...FGKJ - Plasma processing, etching...
2
High energy density technologies in materials science. 2 : IGD Scientific Workshop : proceedings : Novara, 03.05.88-04.05.88.
Book
...FGKJ - Plasma processing, etching...
3
Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /
Book
...FGKJ - Plasma processing, etching...