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semiconductor epitaxy
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ZB
semiconductor epitaxy
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1
Book
Semiconductor technologies. 1986.
Nishizawa, J.
1986
“
...
FGCD
-
Crystal
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...
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2
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Symposium on materials issues in silicon integrated circuit processing : Palo-Alto, CA, 15.04.1986-18.04.1986.
Wittmer, M.
1986
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FGCD
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Crystal
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3
Book
Werkstoffe der Halbleitertechnik /
Anders, Rudolf
1985
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FGCD
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Crystal
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3
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3
Type of Literature
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1
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ZB
Name
Anders, Rudolf
1
Falk, Horst
1
Hadamovsky, Hans-Friedrich
1
Nishizawa, J.
1
Wittmer, M.
1
Subject
semiconductor epitaxy
semiconductor processing
2
rapid thermal processing
1
Classification
FGCD - Crystal growth of specific substances
3
FAF - Materials research - comprehensive works
1
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
1
FGMH - Metallization, physics of microelectronics
1
FJK - Specific semiconductor materials
1
Language
German
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