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Chemical engineering.
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Microelectronics.
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Surfaces (Physics).
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Chemical engineering.
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Microelectronics.
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Surfaces (Physics).
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E-Book
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication [E-Book] : From Particle Scale to Feature, Die and Wafer Scales /
Luo, Jianfeng
2004
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Dornfeld, David A.
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Luo, Jianfeng
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Chemical engineering.
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Electronic circuits.
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