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Microelectromechanical systems.
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Nanotechnology.
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Microelectromechanical systems.
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E-Book
Fundamentals of Nanomechanical Resonators [E-Book] /
Schmid, Silvan
2023
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Nanoelectromechanical
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....
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E-Book
Nanomaterials for Innovative Energy Systems and Devices [E-Book] /
Khan, Zishan H.
2022
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Nanoelectromechanical
systems
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Khan, Zishan H.
1
Roukes, Michael Lee
1
Schmid, Silvan
1
Villanueva, Luis Guillermo
1
Subject
Microelectromechanical systems.
Microtechnology.
2
Nanoelectromechanical systems.
2
Nanotechnology.
Microresonators (Optoelectronics).
1
Nanowires.
1
Language
English
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