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1
Book
Epitaktische Seltenerd-Scandatschichten für die Mikroelektronik /
Heeg, Tassilo.
2007
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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Heeg, Tassilo.
1
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layer compound
1
layer structure
1
microelectronics
1
rare earth compound
1
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FGMH - Metallization, physics of microelectronics
1
TBD - Microelectronics
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