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1
Book
Handbook of sputter deposition technology : principles, technology, and applications /
Wasa, Kiyotaka.
1992
Subject (ZB):
“
...
sputter
deposition
...
”
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ZB
1
Name
Hayakawa, Shigeru.
1
Wasa, Kiyotaka.
1
Subject
sputter deposition
1
Classification
FGKC - Vacuum deposition, MBE
1
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