1
Polymers for high technology: electronics and photonics : Polymers for high technology: symposium : Meeting of the American Chemical Society. 0192 : Anaheim, CA, 07.09.86-12.09.86.
Book
2
Advances in resist technology and processing : 0004: proceedings : Santa-Clara, CA, 02.03.87-03.03.87.
Book
...FGME - Microlithography...