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Frieser, R. G.
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Frieser, R. G.
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Plasma processing : Plasma etching and deposition: proceedings of the symposium : Electrochemical Society: spring meeting. 1980 : Saint-Louis, MO, 11.05.1980-16.05.1980.
Frieser, R. G.
1981
“
...
FGK
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Dünnfilmtechnologie
,
Epitaxie
...
”
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Frieser, R. G.
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plasma etching
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plasma processing
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FGKJ - Plasma processing, etching
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