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Thompson, L. F.
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Conference Publication
Thompson, L. F.
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Materials for microlithography: radiation sensitive polymers : Based on a symposium : American Chemical Society meeting. 0187 : Saint-Louis, MO, 08.04.84-13.04.84.
Thompson, L. F.
1984
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Microlithography
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Book
Introduction to microlithography : Theory, materials, and processing : American Chemical Society meeting. 0185 : Seattle, WA, 20.03.83-25.03.83.
Thompson, L. F.
1983
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Microlithography
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Thompson, L. F.
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microlithography
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FGME - Microlithography
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FNKG - Stability of plastics - physical and chemical effects
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