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Conference Publication
electron beam lithography
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Conference Publication
electron beam lithography
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1
Book
Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
Seeger, David E.
1997
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Microlithography
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2
Book
Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
Wagner, A.
1984
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Microlithography
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Name
Seeger, David E.
1
Wagner, A.
1
Subject
electron beam lithography
X-ray lithography
1
ion beam lithography
1
microlithography
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nanostructures
1
optical microlithography
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FGME - Microlithography
2
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English
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