Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
Conference Publication
microfabrication (for microelectronics only)
Reset Filters
Show filters (2)
Conference Publication
microfabrication (for microelectronics only)
Ask a Librarian
Books & more
: Hits
1 - 2
of
2
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Microcircuit engineering. 1984 : Microcircuit engineering conference. 1984: proceedings : ME. 1984: proceedings : Berlin, 25.09.1984-29.09.1984.
Heuberger, A.
1985
“
...
FGME
-
Microlithography
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
Microcircuit engineering. 1983 : Microcircuit engineering conference. 1983: proceedings : ME. 1983: proceedings : Cambridge, 25.09.1983-29.09.1983 /
Ahmed, Haroon
1983
“
...
FGME
-
Microlithography
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Available as
Print Edition
2
Material Type
Book
2
Type of Literature
Conference Publication
Year of Publication
From:
To:
Location
ZB
2
Name
Ahmed, Haroon
1
Cleaver, John R. A.
1
Heuberger, A.
1
Jones, Geraint A. C.
1
Subject
microfabrication (for microelectronics only)
microlithography
1
Classification
FGME - Microlithography
2
Language
English
1
×
Loading...
