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Conference Publication
plasma etching
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Conference Publication
plasma etching
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1
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Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
Broszeit, E.
1989
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FGK
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Dünnfilmtechnologie
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Epitaxie
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2
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Plasma processing : Plasma etching and deposition: proceedings of the symposium : Electrochemical Society: spring meeting. 1980 : Saint-Louis, MO, 11.05.1980-16.05.1980.
Frieser, R. G.
1981
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FGK
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Dünnfilmtechnologie
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Epitaxie
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Broszeit, E.
1
Frieser, R. G.
1
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plasma etching
plasma processing
2
plasma deposition
1
surface modification
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FGKJ - Plasma processing, etching
2
FPUJ - Surface engineering
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