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Conference Publication
surface modification
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Conference Publication
surface modification
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1
Book
Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
Broszeit, E.
1989
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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Select result number 2
2
Book
Plasma surface engineering vol 0002 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
Broszeit, E.
1989
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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2
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Conference Publication
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ZB
2
Name
Broszeit, E.
2
Subject
surface modification
plasma deposition
1
plasma etching
1
plasma processing
1
Classification
FGKJ - Plasma processing, etching
2
FPUJ - Surface engineering
2
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