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Select result number 21
21
Book
Plasma processing : Plasma etching and deposition: proceedings of the symposium : Electrochemical Society: spring meeting. 1980 : Saint-Louis, MO, 11.05.1980-16.05.1980.
Frieser, R. G.
1981
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Dünnfilmtechnologie
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Epitaxie
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Select result number 22
22
Book
Vapour growth and epitaxy : Vapour growth and epitaxy : proceedings of the international conference. 0003 : Amsterdam, 18.08.75-21.08.75.
Cullen, G. W.
1975
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Dünnfilmtechnologie
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23
Book
Crystal growth and epitaxy from the vapour phase : International conference on crystal growth and epitaxy from the vapour phase 0001: proceedings : Zürich, 23.09.70-26.09.70.
Kaldis, E.
1971
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Dünnfilmtechnologie
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23
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Book
23
Type of Literature
Conference Publication
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ZB
23
PTJ
2
IBN-1-2
1
Name
Auciello, Orlando
2
Bean, J. C.
2
Broszeit, E.
2
Doehl-Oelze, R.
2
Baldereschi, A.
1
Chang, L. L.
1
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Choy, Kwang-Leong
1
Cleemann, L.
1
Cole-Hamilton, D. J.
1
Cullen, G. W.
1
Engemann, Jürgen
1
Farrow, R. F.
1
Frey, Margret
1
Frieser, R. G.
1
Funk-Kath, Ursula
1
Haab, Anna
1
Hardtdegen, Hilde
1
Jacobsson, J. R.
1
Kaldis, E.
1
Law, Clarence G.
1
Longo, F. N.
1
Paorici, C.
1
Peters, R. J.
1
Pollard, Richard.
1
Rieß, Sally
1
Schuck, Martin
1
Vescan, Andrei
1
Waser, Rainer
1
Wenzik, Angela
1
Wille, Luc T.
1
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Subject
thin film technology
6
chemical vapor deposition
5
thin film
4
heterostructure
3
epitaxy
2
ferroelectric material
2
more ...
growth
2
molecular beam epitaxy
2
plasma etching
2
plasma processing
2
silicide
2
silicon
2
surface analysis
2
surface modification
2
vapor deposited coating
2
Josephson device
1
VLSI technology
1
adsorption
1
breakdown
1
crystal growth from vapor
1
crystal structure
1
film
1
hysteresis
1
ion beam
1
ion beam surface modification
1
ion beam technology
1
ion source
1
metal organic compound
1
microstructure
1
microtechnology
1
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Classification
FGK - Thin film technology, epitaxy
10
FGKF - Chemical vapor deposition
5
FGKJ - Plasma processing, etching
4
FAQ - Materials research - institutions, research and development
3
FGKC - Vacuum deposition, MBE
3
FHAB - Surface and thin film characterization
3
more ...
FFPG - Multilayer systems, quantum structures
2
FGM - Microelectronic technology
2
FJKB - Elemental semiconductors
2
FPUG - Special purpose coatings
2
FPUJ - Surface engineering
2
FFJK - Surface reactions
1
FGG - Ion beam technology
1
FJP - Optical materials, crystal optics
1
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Language
English
6
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