ZB 44

Bakish, R. 6 Stover, H. L. 5 Blais, P. D. 3 Ahmed, Haroon 2 Bowden, M. J. 2 Cleaver, John R. A. 2 more ... Jones, Geraint A. C. 2 Lin, B. J. 2 Thompson, L. F. 2 Yanof, A. W. 2 Broers, Alec Nigel 1 Castagne, R. 1 Celler, G. K. 1 Dey, J. 1 Ehrlich, D. J. 1 Feit, E. D. 1 Giffin, J. W. 1 Grubb, D. T. 1 Heuberger, A. 1 Kyser, D. F. 1 Lehmann, H. W. 1 MacDonald, S. A. 1 Markert, H. 1 McMahon, Richard A. 1 Reichmanis, E. 1 Seeger, David E. 1 Tabata, Y. 1 Van der Mast, K. D. 1 Wagner, A. 1 Wilson, A. D. 1 see all ... less ...

microlithography 12 optical microlithography 12 photoresist 8 X-ray lithography 4 microelectronics 4 polymer 3 more ... electron beam lithography 2 microfabrication (for microelectronics only) 2 electric material 1 electron beam welding 1 electronic packaging 1 ion beam lithography 1 ion implantation 1 nanostructures 1 photosensitivity 1 physical radiation effect 1 thin film 1 see all ... less ...

FGME - Microlithography 44 FGJ - Laser and electron beam processing 8 FGGE - Ion beam surface modification 7 FNK - Plastics - application, engineering aspects 4 FAF - Materials research - comprehensive works 2 FNL - Polymers, plastics - specific materials 2 more ... FGML - Characterization of electronic materials 1 FHJ - Scanning electron microscopy, analytical electron microscopy 1 FNKG - Stability of plastics - physical and chemical effects 1 see all ... less ...

English 12 German 2